General description

This Standard Reference Material (SRM) is intended for use in calibrating the secondary ion response to minor and trace levels of boron in a silicon matrix by the analytical technique of secondary ion mass spectrometry (SIMS). A unit of SRM 2137 consists of a single crystal silicon substrate with a surface rendered disordered by silicon ionimplantation. For more information, please refer to the SDS and COA.SRM 2137_cert SRM 2137 _SDS

Legal Information

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology